Wide dynamic range microelectromechanical viscosity sensor

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 340-343

  Borwick, Robert L ^a   Stupar, Philip A ^a   Denatale, Jeffrey F ^a  

^a ROCKWELL SCIENTIFIC COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DRAG; MICROSYSTEMS; VISCOSITY;

LINEAR RESPONSE; MEMSDEVICES; MICRO-ELECTRO-MECHANICAL; POSITION SENSING; VISCOSITY SENSOR; VISCOUS DRAG; WIDE DYNAMIC RANGE;

SOLID-STATE SENSORS;

EID: 85022118263     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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7. www.brookfieldengineering.com
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