Comparison of CPM, PDS and optical transmittance of amorphous carbon nitride films made by a nitrogen radical sputter method

Materials Research Society Symposium - Proceedings

Volumn 675, Issue , 2001, Pages W12.3.1-W12.3.6

  Katsuno, Takashi ^a   Nitta, Shoji ^a   Habuchi, Hitoe ^b  

^a GIFU UNIVERSITY   (Japan)

^b GIFU NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85009919330     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: 10.1557/proc-675-w12.3.1     Document Type: Article

References (11)