Angle-Tunable Liquid Wedge Prism Driven by Electrowetting

Journal of Microelectromechanical Systems

Volumn 16, Issue 6, 2007, Pages 1537-1542

  Takei, Atsushi ^a   Iwase, Eiji ^a   Matsumoto, Kiyoshi ^a   Shimoyama, Isao ^a   Hoshino, Kazunori ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b The University of Texas at Austin   (United States)

Author keywords

Electrostatic devices; microelectromechanical devices; optical device fabrication

Indexed keywords

EID: 85008002440     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.906074     Document Type: Article

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