SCOPUS 정보 검색 플랫폼

Volumn , Issue , 2003, Pages 259-262

A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; OPTICAL FIBERS; OPTICAL SWITCHES; PHOTORESISTS; WAVELENGTH DIVISION MULTIPLEXING;

CROSSBAR TORSION SPRING; HIGH FILL-FACTOR MICRO-MIRROR; OPTICAL CROSSCONNECT; OPTICAL TRANSPORT NETWORK;

MIRRORS;

EID: 0038156068 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (20)

References (7)

2
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- A low voltage two- Axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars
- I.-J. Cho, K.-S. Yun, H.-K. Lee, J.-B. Yoon and E. Yoon, "A Low Voltage Two- Axis Electromagnetically Actuated Micromirror with Bulk Silicon Mirror Plates and Torsion Bars", IEEE Int. MEMS Conf. Tech. Dig., Las Vegas, NV, USA, Jan. 20-24, 2002, pp. 540-543.
- IEEE Int. MEMS Conf. Tech. Dig., Las Vegas, NV, USA, Jan. 20-24, 2002 , pp. 540-543
- Cho, I.-J.¹ Yun, K.-S.² Lee, H.-K.³ Yoon, J.-B.⁴ Yoon, E.⁵

3
- 0038467120
- Electrostatic micromirror with built-in large air-gap for wide range of rotational actuation
- T. -S. Kim, S. -S. Lee, Y. Lee, J. -U. Bu, H. -H. Oh, C. -G. Park, and M. -H. Ha, "Electrostatic micromirror with built-in large air-gap for wide range of rotational actuation," IEEE/LEOS International Conference on Optical MEMS, Okinawa, Japan, Sep. 25-28, 2001, pp. 99-100
- IEEE/LEOS International Conference on Optical MEMS, Okinawa, JAPAN, Sep. 25-28, 2001 , pp. 99-100
- Kim, T.-S.¹ Lee, S.-S.² Lee, Y.³ Bu, J.-U.⁴ Oh, H.-H.⁵ Park, C.-G.⁶ Ha, M.-H.⁷

4
- 0001124243
- Lucent microstar™ micromirror array technology of large optical crossconnects
- V. A. Aksyuk, F. Pardo, C. A. Bolle, S. Arney, C. R. Giles, and D. J. Bishop, "Lucent microstar™ micromirror array technology of large optical crossconnects," Proc. SPIE, vol. 4178, pp. 320-324, 2000
- (2000) Proc. SPIE , vol.4178 , pp. 320-324
- Aksyuk, V.A.¹ Pardo, F.² Bolle, C.A.³ Arney, S.⁴ Giles, C.R.⁵ Bishop, D.J.⁶

5
- 0036118306
- 3-D lithography and metal surface micromachining for RF and microwave MEMS
- J. -B. Yoon, B. -I. Kim, Y. -S. Choi, and E. Yoon, "3-D Lithography and Metal Surface Micromachining for RF and Microwave MEMS," IEEE Int. MEMS Conf. Tech. Dig., Las Vegas, NV, USA, Jan. 20-24, 2002, pp. 673-676
- IEEE Int. MEMS Conf. Tech. Dig., Las Vegas, NV, USA, Jan. 20-24, 2002 , pp. 673-676
- Yoon, J.-B.¹ Kim, B.-I.² Choi, Y.-S.³ Yoon, E.⁴

6
- 0032288380
- Pull-in study of an electrostatic torsion microactuator
- O. Degani, E. Socher, A. Lipson, T. Leitner, D. J. Setter, S. Kaldor, and Y. Nemirovsky, "Pull-in study of an electrostatic torsion microactuator", IEEE J. MEMS, vol. 7 no. 4, pp. 373-379, 1998
- (1998) IEEE J. MEMS , vol.7 , Issue.4 , pp. 373-379
- Degani, O.¹ Socher, E.² Lipson, A.³ Leitner, T.⁴ Setter, D.J.⁵ Kaldor, S.⁶ Nemirovsky, Y.⁷

7
- 0033309290
- Modeling of the optical torsion micromirror
- X. M. Zhang, F. S. Chau, C. Quan and A. Q. Liu, "Modeling of the optical torsion micromirror," Proc. SPIE, vol. 3899, pp. 109-116, 1999.
- (1999) Proc. SPIE , vol.3899 , pp. 109-116
- Zhang, X.M.¹ Chau, F.S.² Quan, C.³ Liu, A.Q.⁴

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