Detailed atomic modeling of Sn plasmas for the EUV source

Journal of Physics: Conference Series

Volumn 112, Issue Part 4, 2008, Pages

  Sasaki, A ^a   Sunahara, A ^b   Nishihawra, K ^c   Nishikawa, T ^d   Koike, F ^e   Tanuma, H ^f  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

^b INSTITUTE FOR LASER TECHNOLOGY   (Japan)

^c OSAKA UNIVERSITY   (Japan)

^d OKAYAMA UNIVERSITY   (Japan)

^e KITASATO UNIVERSITY   (Japan)

^f TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION SPECTROSCOPY; EXTREME ULTRAVIOLET LITHOGRAPHY; FUSION REACTIONS; INERTIAL CONFINEMENT FUSION; ITERATIVE METHODS; LASER FUSION; LIGHT SOURCES; TIN; ULTRAVIOLET DEVICES;

COMPARISON WITH EXPERIMENTS; EMISSION SPECTRUMS; ITERATIVE CALCULATION; RADIATION HYDRODYNAMICS SIMULATION; SATELLITE LINES; SPECTRAL STRUCTURE; TRANSITION ARRAYS; TRANSITION WAVELENGTHS;

ATOMS;

EID: 84996538030     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/112/4/042062     Document Type: Conference Paper

References (5)

1. Stamm U, et al 2006 Proceedings of SPIE vol.6151 Emerging Lithographic Technologies X, 61510O
2. O'Sullivan G and Caroll PK 1981 J. Opt. Soc. Am. 71 227
3. Bar-Shalom A, Oreg J and Klapisch M 1997 Phys. Rev. E 56 R70
4. Sasaki A, Sunahara A, Nishihara K, Nishikawa T, Fujima K, Koike F, Kagawa T and Tanuma H 2007 HEDP 3 250-255
5. Tanuma H, Ohashi H, Shibuya E, Kobayashi N, Okuno T, Fujioka S, Nishimura H and Nishihara K 2005 Nucl. Instrum. Meth. Phys. Res. B 235 331