Synthesis of carbon nitride films by arc-heated atomic nitrogen beams assisted pulsed laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3550, Issue , 1998, Pages 43-52

  Xu, Ning ^a   Du, Yuancheng ^a   Ying, Zhifeng ^a   Ren, Zhongmin ^a   Li, Fuming ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

Atomic nitrogen beams; Carbon nitride; Laser ablation

Indexed keywords

ABLATION; ATOMS; AUGER ELECTRON SPECTROSCOPY; CARBON FILMS; CARBON NITRIDE; LASER ABLATION; LASER MATERIALS PROCESSING; NITRIDES; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

ATOMIC NITROGEN; AUGER ELECTRON SPECTROSCOPIES (AES); CARBON NITRIDE FILMS; COMPOSITION RATIO; DIFFRACTION PEAKS; LASER REPETITION RATE; XPS ANALYSIS;

PULSED LASERS;

EID: 84992248807     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.317911     Document Type: Conference Paper

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