Chemical Vapor Deposition of Copper for Advanced On-Chip Interconnects

MRS Bulletin

Volumn 19, Issue 8, 1994, Pages 49-54

  Gelatos, A V ^a   Jain, A ^a   Marsh, R ^a   Mogab, C J ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84972102772     PISSN: 08837694     EISSN: 19381425     Source Type: Journal    
DOI: 10.1557/S0883769400047734     Document Type: Article

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