High speed LIGBT with localized lifetime control by using high dose and low energy helium implantation

2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings

Volumn 1, Issue , 2001, Pages 166-169

  Fang, Jian ^a   Li, Zhaoji ^a   Li, Hongyan ^a   Yang, Jian ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84966661249     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSICT.2001.981448     Document Type: Conference Paper

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