Multi-generation CVD low κ films for 0.13 μm and beyond

2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings

Volumn 1, Issue , 2001, Pages 358-363

  Lee, P W ^a   Lang, Chi I ^a   Sugiarto, D ^a   Xia, Li Qun ^a   Gotuaco, M ^a   Yieh, E ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84966571214     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSICT.2001.981493     Document Type: Conference Paper

References (10)

1. P. Singer, Semiconductor International, Nov. 1994, p.52.
2. C. Ting, and T.E. Seidel, Proc. of MRS Symposium, (San Francisco, Spring 1995), Vol. 381, p.3.
3. F. Ip, and C. Ting, Proc. of MRS Symposium, (San Francisco, Spring 1995), Vol. 381, p. 135.
4. N.H. Hendricks, Solid State Tech., July 1995, p. 117.
5. K.K. Young, S.Y. Wu, C.H. Wang, C.T. Lin, J.Y. Cheng, M. Chiang, S.H. Chen, T.C. Lo, Y.S. Chen, J.H. Chen, L.J. Chen, S.Y. Hou, J.J. Liaw, T.E. Chang, C.S. Hou, J. Shih, S.M. Jeng, H.C. Hsieh, Y. Ku, T. Yen, H. Tao, L.C. Chao, S. Shue, S.M. Jang, T.C. Ong, C.H. Yu, M.S. Liang, C.H. Diaz, J.Y.C. Sun, Proc. IEEE Intern. Electron. Device Meeting, (San Francisco Dec. 2000), p. 563.
6. R.D. Goldblatt, B. Agarwala, M.B. Anand, E.P. Barth, G.A. Biery, Z.G. Chen, S. Cohen, J.B. Connolly, A. Cowley, T. Dalton, S.K. Das, C.R. Davis, A. Deutsch, C. DeWan, D.C. Edelstein, P.A. Emmi, C.G. Faltermeier, J.A. Fitzsimmons, J. Hedrick, J.E. Heidenreich, C.K. Hu, J. Liu, N.E. Lustig, S. Malhotra, D.K. Manger, V. McGahay, R. Mih, H.A. Nye, S. Purushothaman, H.A. Rathore, S.C. Seo, T.M. Shaw, A.H. Simon, T.A. Spooner, M. Stetter, R.A. Wachnik, J.G.. Ryan, Proc. of 2000 Intern. Interconnect Tech. Conf., (San Francisco, June 2000), p. 261.
7. G. Lee, D. Edelstein, R. Conti, W. Cote, K. Low, D. Dobuzinsky, G. Feng, K. Dev, P. Wrschka, P. Shafer, R.Ramachandran, A. Simpson, E. Liniger, E. Simonyi, T. Dalton, T. Spooner, C. Jahnes, E. Kaltalioglu, R. Schutz, A. Grill, Proc. of Advanced Metallization Conf. (San Diego, Oct. 2000), to be published.
8. R. Donaton, H. Struyf, M. Lepage, B. Coenegrachts, M. Stucchi, D. DeRoest, M.R. Baklanov, S. Vanhaelemeersch, K. Maex, F. Gaillard, L.-Q. Xia, T.-H. Lim, M. Gotuaco, E. Yieh, Proc. of Advanced Metallization Conf. (San Diego, Oct. 2000), to be published.
9. th Meeting, (Washington D.C., March 2001), to be published.
10. Al Grill, and V. Patel, Proc. of MRS Symposium, (San Francisco, Spring 2001), to be published.