Electrostatically actuated moving-fibre switch

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 111-112

  Hoffmann, M ^a   Nusse D ^a   Voges, E ^a  

^a TU DORTMUND UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FIBERS; MOEMS;

ACTUATION VOLTAGES; COUPLING LOSS; FIBRE ALIGNMENTS; OPTICAL PATH; OPTICAL PROTECTION; PARALLEL-PLATE ACTUATORS;

ELECTROSTATIC ACTUATORS;

EID: 84963719921     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031468     Document Type: Conference Paper

References (6)

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6. M. Hoffmann, D. Nüsse, E. Voges, Journal of Micromech. Microeng. 11 (2001), pp. 323-328