Electron beam recording with a novel differential pumping head realizing over 50 GB/layer capacity disc

2002 International Symposium on Optical Memory and Optical Data Storage Topical Meeting, ISOM/ODS 2002 - Joint International Symposium on Optical Memory and Optical Data Storage 2002, Technical Digest

Volumn , Issue , 2002, Pages 18-20

  Takeda, M ^a   Furuki, M ^a   Yamamoto, M ^a   Aki, Y ^a   Kawase, H ^a   Koizumi, Mitsuru ^b   Takashima, Susumu ^b   Miyokawa, Toshiaki ^b   Date, Naoki ^b  

^a SONY CORPORATION   (Japan)

^b JEOL LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATMOSPHERIC PRESSURE; COST EFFECTIVENESS; DATA STORAGE EQUIPMENT; DIGITAL STORAGE; ELECTRON BEAM PUMPING; ELECTRON BEAMS; ELECTRONS; LASER BEAMS; OPTICAL DISK STORAGE; OPTICAL RECORDING; ULTRAVIOLET LASERS; VIDEODISKS;

DIFFERENTIAL PUMPING; ELECTRON BEAM RECORDERS; ELECTRON BEAM RECORDING; ELECTRON-BEAM COLUMNS; HIGH-SPEED RECORDING; RECORDING PERFORMANCE; SILICON SUBSTRATES; TRANSLATIONAL ACCURACY;

OPTICAL DATA STORAGE;

EID: 84962816251     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMODS.2002.1028553     Document Type: Conference Paper

References (6)

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