Aluminum metal-insulator-metal connections for coplanar waveguides

2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems

Volumn , Issue , 2000, Pages 87-90

  Zhao, W ^a   Schollhorn C ^a   Kasper, E ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COPLANAR WAVEGUIDES; ELECTRIC LINES; INTEGRATED CIRCUITS; METAL INSULATOR BOUNDARIES; METALS; MICROSTRIP LINES; MONOLITHIC INTEGRATED CIRCUITS; RECONFIGURABLE HARDWARE; SEMICONDUCTOR INSULATOR BOUNDARIES; SILICON;

AIR-BRIDGES; ALUMINUM METAL; COPLANAR TRANSMISSION LINES; GROUND CONNECTIONS; HIGH-RESISTIVITY SILICON SUBSTRATE; METAL INSULATOR METALS; RF MEASUREMENTS; SIGNAL LINES;

MIM DEVICES;

EID: 84961990679     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMIC.2000.844305     Document Type: Conference Paper

References (11)

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