High-Frequency Behavior of Coupled CMOS Interconnects Built in Different Metallization Layers

56th ARFTG Conference Digest: Metrology and Test for RF Telecommunications, ARFTG 2000

Volumn , Issue , 2000, Pages

  Arz, Uwe ^a   Williams, Dylan F ^b   Walker, David K ^b   Grabinski, Hartmut ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; METALLIZING; SCATTERING PARAMETERS;

BROADBAND MEASUREMENTS; FREQUENCY DEPENDENT; HIGH FREQUENCY HF; METALLIZATION LAYERS; NUMERICAL CALCULATION; PROPAGATION CHARACTERISTICS; S-PARAMETER MEASUREMENTS; TRANSMISSION CHARACTERISTICS;

INTEGRATED CIRCUIT INTERCONNECTS;

EID: 84960380401     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ARFTG.2000.327425     Document Type: Conference Paper

References (11)

1. Y. Eo, W. R. Eisenstadt, J.Y. Jeong, and O. Kwon, "A New On-Chip Interconnect Crosstalk Model and Experimental Verification for CMOS VLSI Circuit Design", IEEE Trans. Electron Devices, vol. 47, no. 1, pp. 129-140, January 2000.
2. D. E. Bockelman and W. R. Eisenstadt, "Direct Measurement of Crosstalk Between Integrated Differential Circuits", IEEE Trans. Microwave Theory Tech., vol. 48, no. 8, pp. 1410-1413, August 2000.
3. D. F. Williams, J. E. Rogers, and C. L. Holloway, "Multiconductor Transmission Line Characterization: Representations, Approximations, and Accuracy", IEEE Trans. Microwave Theory Tech., vol. 47, no. 4, pp. 403-409, April 1999.
4. U. Arz, D. F. Williams, D. K. Walker, J. E. Rogers, M. Rudack, D. Treytnar, and H. Grabinski, "Characterization of Asymmetric Coupled CMOS Lines", 2000 IEEE MTT-S Symposium Dig., pp. 609-612, June 11-16, 2000.
5. U. Arz, D. F. Williams, D. K. Walker, and H. Grabinski, "Accurate Electrical Measurement of Coupled Lines on Lossy Silicon", 2000 EPEP Conference Dig., October 23-25, 2000.
6. D. F. Williams, U. Arz, and H. Grabinski, "Accurate Characteristic Impedance Measurement on Silicon", 1998 IEEE MTT-S Symposium Dig., pp. 1917-1920, June 9-11, 1998.
7. R. B. Marks, "A Multiline Method of Network Analyzer Calibration", IEEE Trans. Microwave Theory Tech., vol. MTT-39, no. 7, pp. 1205-1215, July 1991.
8. E. Grotelüschen, L. S. Dutta and S. Zaage, "Quasi-analytical Analysis of the Broadband Properties of Multiconductor Transmission Lines on Semiconducting Substrates", IEEE Trans. Comp., Packag., and Manufact. Tech.-Part B, vol. 17, pp. 376-382, Aug. 1994.
9. D. F. Williams and D. K. Walker, "In-line Multiport Calibration", 51st ARFTG Conf. Dig., pp. 88-90, June 12, 1998.
10. D. F. Williams, L. A. Hayden, and R. B. Marks, "A Complete Multimode Equivalent-Circuit Theory for Electrical Design", J. Res. Natl. Inst. Stand. Technol., vol. 102, no. 4, pp. 405-423, July - Aug.1997.
11. P. T. Boggs, R. H. Byrd, and R. D. Schnabel, "A Stable and Efficient Algorithm for Nonlinear Orthogonal Distance Regression", SIAM J. Sci. Stat. Comput., pp. 1052-1078, Nov. 1987.