A Novel Sol-Gel γ-Al2O3 Thin-Film-Based Rapid SAW Humidity Sensor

IEEE Transactions on Electron Devices

Volumn 62, Issue 12, 2015, Pages 4242-4250

  Mittal, Upendra ^a   Islam, Tarikul ^b   Nimal, Archibald Theodore ^c   Sharma, Manoj Umesh ^c  

^a SOLID STATE PHYSICS LABORATORY   (India)

^b JAMIA MILLIA ISLAMIA CENTRAL UNIVERSITY   (India)

^c DRDO   (India)

Author keywords

Moisture measurement; response characteristics; SAW oscillator; sol gel Al2O3; surface acoustic wave (SAW) device

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ALUMINA; ALUMINUM; ALUMINUM COATINGS; ATOMIC FORCE MICROSCOPY; CAPACITIVE SENSORS; FOOD PROCESSING; FREQUENCY RESPONSE; HUMIDITY SENSORS; METALS; MOISTURE; MOISTURE DETERMINATION; OSCILLATORS (ELECTRONIC); PROCESSED FOODS; SAWING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICES; SOL-GEL PROCESS; SOL-GELS; X RAY DIFFRACTION;

ALUMINUM OXIDE SENSORS; FIELD EMISSION SCANNING ELECTRON MICROSCOPES; HIGH SURFACE-TO-VOLUME RATIO; MOISTURE DETECTION; POROUS METAL OXIDES; SENSITIVE THIN FILMS; SURFACE ACOUSTIC WAVES; TEXTILE PRODUCTION;

THIN FILMS;

EID: 84959464469     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2015.2492139     Document Type: Article

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