MEMS for IT applications

MHS 2001 - Proceedings of 2001 International Symposium on Micromechatronics and Human Science

Volumn , Issue , 2001, Pages 17-24

  Lee, Sukhan ^a   Kim, Chungwoo ^a   Jung, Sunghwan ^a   Song, In Sup ^a   Cho, Yong Chul ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CELLULAR TELEPHONE SYSTEMS; CONSUMER ELECTRONICS; ELECTROSTATIC ACTUATORS; HEAT SINKS; SOCIAL SCIENCES;

IT APPLICATIONS; MEMS ACTUATORS; MEMS APPLICATIONS; MEMS GYROSCOPE; MICRO COOLING SYSTEM; RECENT PROGRESS; RF-MEMS SWITCHES; SAMSUNG;

ELECTRONIC COOLING;

EID: 84958182791     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.2001.965216     Document Type: Conference Paper

References (9)

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