Optical Metrology of Diffuse Surfaces

Optical Shop Testing: Third Edition

Volumn , Issue , 2006, Pages 756-807

  Creath, Katherine ^a   Schmit, Joanna ^b   Wyant, James C ^c  

^a Optineering   (United States)

^b VEECO INSTRUMENTS INC   (United States)

^c UNIVERSITY OF ARIZONA   (United States)

Author keywords

Diffuse surface optical metrology; Holographic and speckle tests; Moir and fringe projection interferometry

Indexed keywords

DIFFUSE SURFACES; FRINGE PROJECTION; OPTICAL METROLOGY;

HOLOGRAPHIC INTERFEROMETRY;

EID: 84955104781     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9780470135976.ch16     Document Type: Chapter

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