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Volumn 2000-January, Issue , 2000, Pages 99-103
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Lifetime mapping of si wafers by an infrared camera
a b a a,b |
Author keywords
[No Author keywords available]
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Indexed keywords
CAMERAS;
INFRARED DEVICES;
MAPPING;
SILICON WAFERS;
TEMPERATURE INDICATING CAMERAS;
HIGH SPATIAL RESOLUTION;
IN-LINE PROCESS CONTROL;
INFRA-RED CAMERAS;
INFRARED MEASUREMENTS;
MINORITY CARRIER;
MINORITY CARRIER LIFETIMES;
PHOTOCONDUCTANCE;
QUASI-STEADY-STATE PHOTOCONDUCTANCE;
CARRIER LIFETIME;
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EID: 84949569515
PISSN: 01608371
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/PVSC.2000.915763 Document Type: Conference Paper |
Times cited : (67)
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References (13)
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