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Volumn 2001-January, Issue , 2001, Pages 27-31
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Passive and active probe arrays for Dip-Pen Nanolithography
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
NANOTECHNOLOGY;
PROBES;
ACTIVE PROBE;
DIP-PEN NANOLITHOGRAPHY;
HIGH SPEED;
MICROMACHINING TECHNIQUES;
PROBE ARRAY;
SUB-100 NM;
NANOLITHOGRAPHY;
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EID: 84949236456
PISSN: 19449399
EISSN: 19449380
Source Type: Conference Proceeding
DOI: 10.1109/NANO.2001.966387 Document Type: Conference Paper |
Times cited : (8)
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References (5)
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