Nano meter stepping drive of surface acoustic wave motor

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2001-January, Issue , 2001, Pages 495-500

  Shigematsu, Takashi ^a   Kurosawa, Minoru Kuribayashi ^a   Asai, Katsuhiko ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; NANOTECHNOLOGY;

DRIVING VOLTAGES; DRIVING WAVE; HIGH RESOLUTION; NANO METERS; OPEN-LOOP; PRE LOADS; SUB NANOMETERS; SURFACE ACOUSTIC WAVES;

ACOUSTICS;

EID: 84949221226     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2001.966473     Document Type: Conference Paper

References (7)

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3. N. Osakabe, M. Chiba, M. K. Kurosawa and T. Higuchi, "Experimental Estimation of Surface Acoustic Wave Linear Motor", Proc. of Int. Conf. on Micromechatronics for Info, and Precis. Equip. Tokyo, pp. 265-268, 1997.
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6. M. Takasaki, M. K. Kurosawa and T. Higuchi, "Optimum contact conditions for miniaturized Surface acoustic wave linear motor", Ultrasonics 38, pp. 51-53, 2000.
7. M. K. Kurosawa, H. Itoh, K. Asai, M. Takasaki and T. Higuchi, "Optimization of Slider Contact Face Geometry for Surface Acoustic Wave Motor", Proc. of Micro Electro Mechanical Systems, Interlaken, Suisse, pp. 252-255, 2001.