A Novel approach to modeling the transfer functions of four-terminal-transducer pressure sensors within a single simulation tool

Sensors and Actuators, A: Physical

Volumn 80, Issue 1, 2000, Pages 15-22

  Buchhold, R ^a   Gollee, R ^a   Nakladal, A ^a   Gerlach, G ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; FINITE ELEMENT METHOD; PRESSURE TRANSDUCERS; STRESSES; TENSORS; THERMAL CONDUCTIVITY; TRANSFER FUNCTIONS;

FOUR-TERMINAL-TRANSDUCER (FTT) PRESSURE SENSORS;

SENSORS;

EID: 0033904567     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00297-6     Document Type: Article

References (5)

1. Bao M.-H., Qi W.-J., Wang Y. Geometric design rules of four-terminal gauge for pressure sensors. Sensors and Actuators. 18:1989;149-156.
2. Gridchin A.V., Gridchin V.A. The four-terminal transducer: theory and comparison with piezoresistive bridge. Sensors and Actuators A. 58:1997;219-223.
3. Gridchin V.A., Pirogova R.A. Numerical simulation of multiterminal silicon transducers. Sensors and Actuators A. 65:1998;5-9.
4. Bao M.-H., Wang Y. Analysis and design of a four-terminal silicon pressure sensor at the center of a diaphragm. Sensors and Actuators. 12:1987;49-56.
5. Frank R. Pressure sensors merge micromachining and microelectronics. Sensors and Actuators A. 28:1991;93-101.