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Volumn 6, Issue , 2015, Pages 10-13

A hybrid roll-to-roll AFM set-up for high throughput tip-based nano-machining

Author keywords

Atomic Force Microscopy probe based nano machining; Roll to roll processing

Indexed keywords

ATOMIC FORCE MICROSCOPY; COST EFFECTIVENESS; CUTTING TOOLS; POLYMETHYL METHACRYLATES; PROBES; THROUGHPUT;

EID: 84946829804     PISSN: 22138463     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mfglet.2015.11.002     Document Type: Article
Times cited : (6)

References (12)
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  • 2
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    • Kim, Y.1    Lieber, C.M.2
  • 5
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    • Investigation on AFM-based micro/nano-CNC machining system
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    • Design and evaluation of a mechanical nanomanufacturing system for nanomilling
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  • 8
    • 84856928800 scopus 로고    scopus 로고
    • High-rate tunable ultrasonic force regulated nanomachining lithography with an atomic force microscope
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    • Zhang L., Dong J. High-rate tunable ultrasonic force regulated nanomachining lithography with an atomic force microscope. Nanotechnology 2012, 23:085303. 9 pages.
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  • 10
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  • 11
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.