Multiple layer asymmetric vertical comb-drive actuated scanning mirrors

2003 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2003, Pages 12-13

  McCormick, D T ^a,b,c   Tien, N C ^a  

^a University of California   (United States)

^b Cornell University   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Actuators; Etching; Fabrication; Fingers; Micromechanical devices; Mirrors; Resonance; Silicon; Skeleton; Spine

Indexed keywords

ACTUATORS; ETCHING; FABRICATION; MOEMS; MUSCULOSKELETAL SYSTEM; RESONANCE; SILICON; SILICON WAFERS; SINGLE CRYSTALS;

DRIE FABRICATION; FINGERS; MICROMECHANICAL DEVICE; MULTIPLE LAYERS; SINGLE CRYSTAL SILICON; SKELETON; SPINE; VERTICAL COMB DRIVE;

MIRRORS;

EID: 84946211299     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2003.1233443     Document Type: Conference Paper

References (4)

1. J.-L. Yeh, C.-Y. Hui, and N. Tien. "Electrostatic model for an asymmetric combdrive," J. Microelectromech. Syst. 9, pp. 126-135, 2000.
2. U. Kishnamoorthy, "Self-aligned vertical comb-drive actuators for optical scanning micromirrors," Optical MEMS'01, Okinawa, Japan, 2001.
3. V. Milanovic, "Monolithic high aspect ration two-axis optical scanners in soi," Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on, 2003, 2003.
4. Z. Chen, Y. Zhao, S. Srinivas, J. Nelson, N. Prakash, and R. Frostig, "Optical doppler tomography," IEEE J. of Selected Topics in Quantum Electronics 5, pp. 1134-41, 1999.