Design of MEMS tunable capacitor all metal microstructure for RF wireless applications

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 174-177

  Mohamed, Amal ^a   Elsimary, Hamed ^a   Ismail, Mohammed ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

High Q resonator; MEMS tunable capacitor; RF MEMS devices; RF VCO

Indexed keywords

HIGH-Q RESONATOR; MEMS TUNABLE CAPCITOR; RF MEMS DEVICES; RF VCO;

ACTUATORS; BATCH DATA PROCESSING; CAPACITORS; COMPUTER SIMULATION; DIELECTRIC MATERIALS; MICROSTRUCTURE; THERMAL EXPANSION; WIRELESS TELECOMMUNICATION SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 6344278628     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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