The hierarchical HDL-based design of an integrated MEMS-CMOS oscillator

DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

Volumn , Issue , 2003, Pages 176-180

  Gaddi, R ^a  

^a UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

Circuit simulation; CMOS technology; Design automation; Electronic circuits; Hardware design languages; Libraries; Mathematical model; Micromechanical devices; Oscillators; Packaging

Indexed keywords

EID: 84945927285     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2003.1287031     Document Type: Conference Paper

References (7)

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4. J.E. Vandemeer, M.S. Kraus, G.K. Fedder, "Hierarchical Representation and Simulation of Micromachined Inertial Sensors," Proc. of MSM98, Santa Clara, CA, April 6-8 1998, pp.540-545.
5. J.V. Clark, et Al., "Fast, accurate MEMS design using SUGAR v0.5," Proc. 1998 Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, USA, pp.191-196.
6. J.A. Fay, Fluid Mechanics, Massachusetts Institute of Technology Press, 1994.
7. C.T.-C. Nguyen, R.T. Howe, "An Integrated CMOS Micromechanical Resonator High-Q Oscillator," IEEE Journal Solid-State Circ., Vol.34, pp.440-455, Apr. 1999.