Issues in MEMS macromodeling

Proceedings of the IEEE International Workshop on Behavioral Modeling and Simulation, BMAS

Volumn 2003-January, Issue , 2003, Pages 64-69

  Fedder, G K ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Electronic circuits; Fabrication; Libraries; Microelectromechanical systems; Microelectronics; Micromechanical devices; Microstructure; Robots; Springs; Thermal stresses

Indexed keywords

BEHAVIORAL RESEARCH; DIGITAL LIBRARIES; ELECTROMECHANICAL DEVICES; FABRICATION; LIBRARIES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROSTRUCTURE; NETWORKS (CIRCUITS); ROBOTS; SPRINGS (COMPONENTS); THERMAL STRESS;

COMPOSABILITY; CONNECTION POINTS; MACROMODELING; MICRO-MECHANICAL; MICROMECHANICAL DEVICE; MODEL PARTITIONING; REFERENCE FRAME; SYSTEM SIMULATIONS;

INTEROPERABILITY;

EID: 84945174453     PISSN: 21603804     EISSN: 21603812     Source Type: Conference Proceeding    
DOI: 10.1109/BMAS.2003.1249859     Document Type: Conference Paper

References (5)

1. Coventor Architect: http://www.coventor.com/coventor-ware/architect/
2. G. Lorenz, A. Morris, I. Lakkis, "A top-down design flow for MOEMS," Proc. of the SPIE - 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS, April 25-27, 2001, Cannes, France, pp. 126-37.
3. J.V. Clark, A. Agogino, et al., "Addressing the Need for Complex MEMS Design," Proc. MEMS '02, Jan. 20-24, 2002, Las Vegas, NV, USA, pp. 204-209.
4. Q. Jing, Modeling and Simulation for Design of Suspended MEMS, Ph.D thesis, Dept. of ECE, Carnegie Mellon University, 2003.
5. G. K. Fedder and Q. Jing, "A hierarchical circuit-level design methodology for microelectromechanical systems," IEEE Trans. on Circuits and Systems-II, vol. 46, no. 10, Oct. 1999, pp. 1309-1315.