Harmonic cantilevers for nanomechanical sensing of elastic properties

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1124-1127

  Sahin, O ^a   Yaralioglu, G ^a   Grow, R ^a   Zappe, S F ^a   Atalar, A ^b   Quate, C ^a   Solgaard, O ^a  

^a STANFORD UNIVERSITY   (United States)

^b BILKENT UNIVERSITY   (Turkey)

Author keywords

Atomic force microscopy; Elasticity; Mechanical factors; Nanobioscience; Optical imaging; Probes; Resonance; Resonant frequency; Surface topography; Vibrations

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; ELASTICITY; MICROSYSTEMS; NANOCANTILEVERS; NATURAL FREQUENCIES; PROBES; RESONANCE; SURFACE TOPOGRAPHY; TRANSDUCERS; VIBRATIONS (MECHANICAL);

FUNDAMENTAL RESONANCE FREQUENCY; MECHANICAL FACTORS; MECHANICAL INTERACTIONS; NANOBIOSCIENCES; NANOMECHANICAL SENSING; OPTICAL IMAGING; TAPPING-MODE ATOMIC FORCE MICROSCOPY; VIBRATIONS;

SOLID-STATE SENSORS;

EID: 84944743041     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1216967     Document Type: Conference Paper

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