Nanometer gaps by feedback-controlled electromigration

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1530-1533

  Shih, V C Y ^a   Zheng, Siyang ^a   Chang, A ^a   Tai, Yu Chong ^a  

^a California Institute of Technology   (United States)

Author keywords

Electrodes; Electromigration; Gold; Nanoscale devices; Nanotechnology; Size control; Size measurement; Temperature sensors; Topology; Tunneling

Indexed keywords

ACTUATORS; ELECTRODES; ELECTROMIGRATION; ELECTRON TUNNELING; GOLD; MICROSYSTEMS; NANOSTRUCTURES; NANOTECHNOLOGY; SOLID-STATE SENSORS; TEMPERATURE SENSORS; THERMAL EXPANSION; TOPOLOGY; TRANSDUCERS;

NANOGAP ELECTRODES; NANOMETER GAP; NANOSCALE DEVICE; NEW APPROACHES; OPEN CIRCUITS; SIZE CONTROL; SIZE MEASUREMENTS; TUNNELING CURRENT;

PROCESS CONTROL;

EID: 84944724562     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217069     Document Type: Conference Paper

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