A MEMS-based microsensor to measure all six components of force and moment on a near-wall particle in turbulent flow

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 504-507

  Dao, D V ^a   Toriyama, T ^a   Sugiyama, S ^a   Nguyen, A T ^a   Wells, J C ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Art; Calibration; Force measurement; Force sensors; Microsensors; Particle measurements; Piezoresistance; Piezoresistive devices; Silicon; Testing

Indexed keywords

ACTUATORS; CALIBRATION; DEGREES OF FREEDOM (MECHANICS); FORCE MEASUREMENT; KINETIC THEORY; MICROSENSORS; MICROSYSTEMS; SILICON; TESTING; TRANSDUCERS; TURBULENT FLOW;

ART; FORCE SENSOR; PARTICLE MEASUREMENT; PIEZORESISTANCE; PIEZORESISTIVE DEVICES;

SOLID-STATE SENSORS;

EID: 84944721735     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215364     Document Type: Conference Paper

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