Deposition of β-Ga2O3 layers by sublimation on sapphire substrates of different orientations

Physics of the Solid State

Volumn 57, Issue 7, 2015, Pages 1342-1346

  Maslov, V N ^a,b   Nikolaev, V I ^a,b,c   Krymov, V M ^a,b   Bugrov, V E ^b   Romanov, A E ^a,b  

^a IOFFE INSTITUTE   (Russian Federation)

^b ITMO UNIVERSITY   (Russian Federation)

^c Company “Perfect Crystals LLC” ^*  (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84943166674     PISSN: 10637834     EISSN: 10906460     Source Type: Journal    
DOI: 10.1134/S1063783415070215     Document Type: Article

References (5)

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3. Liu Yang, Ma Jiamping, Liu Fuli, Zang Yuan, and Liu Yantao, J. Semicond. 35 (3), 033001-1 (2014).
4. V. N. Maslov, V. M. Krymov, M. N. Blashenkov, A. A. Golovatenko, and V. I. Nikolaev, Tech. Phys. Lett. 40 (4), 303 (2014).
5. V. N. Maslov, V. M. Krymov, E. V. Kalashnikov, and V. I. Nikolaev, Fiz. Mekh. Mater. 5 (21), 194 (2014).