Equivalent of the point spread function for partially coherent imaging

Optica

Volumn 2, Issue 8, 2015, Pages 736-739

  Mehta, Shalin B ^a   Sheppard, Colin J R ^b  

^a MARINE BIOLOGICAL LABORATORY   (United States)

^b ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

Author keywords

Lithography; Optical transfer functions; Partial coherence in imaging; Phase space in wave optics; X ray imaging

Indexed keywords

LITHOGRAPHY; OPTICAL TRANSFER FUNCTION; PHOTOLITHOGRAPHY;

DIFFERENTIAL INTERFERENCE CONTRAST MICROSCOPES; IMAGE FORMATION MODELS; PARTIAL COHERENCE; PARTIALLY COHERENT ILLUMINATION; PARTIALLY COHERENT IMAGING; POINT SPREAD FUNCTION MODEL; WAVE OPTICS; XRAY IMAGING;

PHASE SPACE METHODS;

EID: 84941241714     PISSN: 23342536     EISSN: None     Source Type: Journal    
DOI: 10.1364/OPTICA.2.000736     Document Type: Letter

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