-
1
-
-
0000154350
-
The concept of degree of coherence and its application to optical problems
-
F. Zernike, "The concept of degree of coherence and its application to optical problems, " Physica 5, 785-795 (1938).
-
(1938)
Physica
, vol.5
, pp. 785-795
-
-
Zernike, F.1
-
2
-
-
85066357098
-
-
Wiley Classical Library ed. Wiley Chap. 7
-
J. W. Goodman, Statistical Optics, Wiley Classical Library ed. (Wiley, 2000), Chap. 7.
-
(2000)
Statistical Optics
-
-
Goodman, J.W.1
-
3
-
-
0000619340
-
The concept of partial coherence in optics
-
H. H. Hopkins, "The concept of partial coherence in optics, " Proc. Royal Soc. 208, 263-277 (1951).
-
(1951)
Proc. Royal Soc.
, vol.208
, pp. 263-277
-
-
Hopkins, H.H.1
-
4
-
-
0017002413
-
Image of a periodic complex object in an optical system under partially coherent illumination
-
Y. Ichioka and T. Suzuki, "Image of a periodic complex object in an optical system under partially coherent illumination, " J. Opt. Soc. Am. 66, 921-932 (1976).
-
(1976)
J. Opt. Soc. Am.
, vol.66
, pp. 921-932
-
-
Ichioka, Y.1
Suzuki, T.2
-
5
-
-
0019018809
-
Partially coherent imaging in two dimensions and the theoretical limits of projection printing in microfabrication
-
B. J. Lin, "Partially coherent imaging in two dimensions and the theoretical limits of projection printing in microfabrication, " IEEE Trans. Electron. Devices 27, 931-938 (1980).
-
(1980)
IEEE Trans. Electron. Devices
, vol.27
, pp. 931-938
-
-
Lin, B.J.1
-
6
-
-
0001561298
-
On the diffraction theory of optical images
-
H. H. Hopkins, "On the diffraction theory of optical images, " Proc. Royal Soc. 217, 408-432 (1953).
-
(1953)
Proc. Royal Soc.
, vol.217
, pp. 408-432
-
-
Hopkins, H.H.1
-
8
-
-
0001574990
-
Matrix treatment of partial coherence
-
E. Wolf, ed. North-Holland Chap. 3
-
H. Gamo, "Matrix treatment of partial coherence, " in Progress in Optics, E. Wolf, ed. (North-Holland, 1964), Vol. III, Chap. 3.
-
(1964)
Progress in Optics
, vol.3
-
-
Gamo, H.1
-
9
-
-
34250482380
-
Theory of coherence
-
J. Peřina, "Theory of coherence, " Czech. J. Phys. 19, 151-194 (1969).
-
(1969)
Czech. J. Phys.
, vol.19
, pp. 151-194
-
-
Peřina, J.1
-
10
-
-
0020173576
-
Simulation of partially coherent imagery in the space and frequency domains and by modal expansion
-
B. E. A. Saleh and M. Rabbani, "Simulation of partially coherent imagery in the space and frequency domains and by modal expansion, " Appl. Opt. 21, 2770-2777 (1982).
-
(1982)
Appl. Opt.
, vol.21
, pp. 2770-2777
-
-
Saleh, B.E.A.1
Rabbani, M.2
-
11
-
-
0028458906
-
Simulation of partially coherent imaging by outer-product expansion
-
J. van der Gracht, "Simulation of partially coherent imaging by outer-product expansion, " Appl. Opt. 33, 3725-3731 (1994).
-
(1994)
Appl. Opt.
, vol.33
, pp. 3725-3731
-
-
Gracht Der J.Van1
-
12
-
-
0141618858
-
Propagation effects of partially coherence in optical lithography
-
R. J. Socha and A. R. Neureuther, "Propagation effects of partially coherence in optical lithography, " J. Vac. Sci. Technol. B 14, 3724-3729 (1996).
-
(1996)
J. Vac. Sci. Technol. B
, vol.14
, pp. 3724-3729
-
-
Socha, R.J.1
Neureuther, A.R.2
-
13
-
-
60949091121
-
Computation theory of partially coherent imaging by stacked pupil shift matrix
-
K. Yamazoe, "Computation theory of partially coherent imaging by stacked pupil shift matrix, " J. Opt. Soc. Am. A 25, 3111-3119 (2008).
-
(2008)
J. Opt. Soc. Am. A
, vol.25
, pp. 3111-3119
-
-
Yamazoe, K.1
-
14
-
-
72849132816
-
Iterative procedure for in situ extreme ultraviolet optical testing with an incoherent source
-
R. Miyakawa, P. Naulleau, and A. Zakhor, "Iterative procedure for in situ extreme ultraviolet optical testing with an incoherent source, " J. Vac. Sci. Technol. B 27, 2927-2930 (2009).
-
(2009)
J. Vac. Sci. Technol. B
, vol.27
, pp. 2927-2930
-
-
Miyakawa, R.1
Naulleau, P.2
Zakhor, A.3
-
15
-
-
0028515483
-
Phase-shifting masks for microlithography: Automated design and mask requirements
-
Y. C. Pati and T. Kailath, "Phase-shifting masks for microlithography: automated design and mask requirements, " J. Opt. Soc. Am. A 11, 2438-2452 (1994).
-
(1994)
J. Opt. Soc. Am. A
, vol.11
, pp. 2438-2452
-
-
Pati, Y.C.1
Kailath, T.2
-
16
-
-
84867571153
-
Applications of the Wigner distribution function to partially coherent light
-
M. J. Bastiaans, "Applications of the Wigner distribution function to partially coherent light, " J. Opt. Soc. Am. A 3, 1227-1238 (1986).
-
(1986)
J. Opt. Soc. Am. A
, vol.3
, pp. 1227-1238
-
-
Bastiaans, M.J.1
-
17
-
-
75749126587
-
Phase-space representation of partially coherent imaging systems using the Cohen class distribution
-
S. B. Mehta and C. J. R. Sheppard, "Phase-space representation of partially coherent imaging systems using the Cohen class distribution, " Opt. Lett. 35, 348-350 (2010).
-
(2010)
Opt. Lett.
, vol.35
, pp. 348-350
-
-
Mehta, S.B.1
Sheppard, C.J.R.2
-
18
-
-
0014789216
-
Partially coherent imaginary in the presence of aberrations
-
R. Barakat, "Partially coherent imaginary in the presence of aberrations, " Optica Acta 17, 337-347 (1970).
-
(1970)
Optica Acta
, vol.17
, pp. 337-347
-
-
Barakat, R.1
-
19
-
-
77955905325
-
Two matrix approaches for aerial image formation obtained by extending and modifying the transmission cross coefficients
-
K. Yamazoe, "Two matrix approaches for aerial image formation obtained by extending and modifying the transmission cross coefficients, " J. Opt. Soc. Am. A 27 1311-1321 (2010).
-
(2010)
J. Opt. Soc. Am. A
, vol.27
, pp. 1311-1321
-
-
Yamazoe, K.1
-
21
-
-
79952335440
-
Numerical experiment of the Shannon entropy in partially coherent imaging by Koehler illumination to show the relationship to degree of coherence
-
K. Yamazoe and A. R. Neureuther, "Numerical experiment of the Shannon entropy in partially coherent imaging by Koehler illumination to show the relationship to degree of coherence, " J. Opt. Soc. Am. A 28, 448-454 (2011).
-
(2011)
J. Opt. Soc. Am. A
, vol.28
, pp. 448-454
-
-
Yamazoe, K.1
Neureuther, A.R.2
-
22
-
-
84864683483
-
Coherency matrix formulation for partially coherent imaging to evaluate the degree of coherence for image
-
K. Yamazoe, "Coherency matrix formulation for partially coherent imaging to evaluate the degree of coherence for image, " J. Opt. Soc. Am. A 29, 1529-1536 (2012).
-
(2012)
J. Opt. Soc. Am. A
, vol.29
, pp. 1529-1536
-
-
Yamazoe, K.1
-
23
-
-
84979892340
-
The Abbe theory of imaging
-
H. Gross, ed. Wiley-VCH Chap. 21
-
W. Singer, M. Totzeck, and H. Gross, "The Abbe theory of imaging, " in Handbook of Optical Systems 2, H. Gross, ed. (Wiley-VCH, 2005), Chap. 21.
-
(2005)
Handbook of Optical Systems 2
-
-
Singer, W.1
Totzeck, M.2
Gross, H.3
-
24
-
-
85066387193
-
-
Wiley Classical Library ed. Wiley Chap. 5
-
J. W. Goodman, Statistical Optics, Wiley Classical Library ed. (Wiley, 2000), Chap. 5.
-
(2000)
Statistical Optics
-
-
Goodman, J.W.1
-
25
-
-
24644496136
-
Full-chip lithography simulation and design analysis-how OPC is changing IC design
-
C. Spence, "Full-chip lithography simulation and design analysis - how OPC is changing IC design, " Proc. SPIE 5751, 1-14 (2005).
-
(2005)
Proc. SPIE
, vol.5751
, pp. 1-14
-
-
Spence, C.1
|