Hydrogen sensor of Pd-decorated tubular TiO2 layer prepared by anodization with patterned electrodes on SiO2/Si substrate

Sensors and Actuators, B: Chemical

Volumn 222, Issue , 2016, Pages 190-197

  Moon, Jongyun ^a   Hedman, Hannu Pekka ^a   Kemell, Marianna ^b   Tuominen, Aulis ^c   Punkkinen, Risto ^a  

^a UNIVERSITY OF TURKU   (Finland)

^b UNIVERSITY OF HELSINKI   (Finland)

^c UNIVERSITY OF VAASA   (Finland)

Author keywords

Anodization; Hydrogen sensor; Microelectronics; Nanostructures

Indexed keywords

CHEMICAL SENSORS; ELECTRODES; ELECTROLYTES; ETHYLENE; ETHYLENE GLYCOL; HYDROGEN; MICROELECTRONICS; NANOSTRUCTURES; PALLADIUM; SILICA; TITANIUM DIOXIDE; YARN;

ANODIZATIONS; CRYSTALLINE PHASE TRANSFORMATION; HYDROGEN SENSING PROPERTIES; HYDROGEN SENSOR; ORGANIC ELECTROLYTE; PATTERNED ELECTRODE; SENSOR FABRICATION PROCESS; TUBULAR STRUCTURES;

PALLADIUM COMPOUNDS;

EID: 84940753058     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2015.08.054     Document Type: Article

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