Hybrid gas-metal co-implantation with a modified vacuum arc ion source

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 782-786

  Oks, E M ^a   Yushkov, G Yu ^a   Evans, P J ^b   Oztarhan, A ^c   Brown, I G ^d   Dickinson, M R ^d   Liu, F ^d   MacGill, R A ^d   Monteiro, O R ^d   Wang, Z ^d  

^a INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

^b AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

^c DOKUZ EYLUL UNIVERSITY   (Turkey)

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ELECTRIC ARCS; ION BEAMS; ION SOURCES; NITROGEN; OXYGEN; PLATINUM; STAINLESS STEEL; SURFACE TREATMENT; TITANIUM; TRIBOLOGY; ZIRCONIUM;

HYBRID GAS/METAL COIMPLANTATION; VACUUM ARC ION SOURCES;

ION IMPLANTATION;

EID: 0031547866     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00007-4     Document Type: Article

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