Straightforward technique for in situ imaging of spin-coated thin films

Optical Engineering

Volumn 54, Issue 2, 2015, Pages

  Toolan, Daniel T W ^a  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

crystals; microscopy; polymers; thin films

Indexed keywords

COATINGS; CRYSTALS; MICROSCOPIC EXAMINATION; PHOTORESISTS; POLYMERS; SPIN COATING; THIN FILMS;

CONTAMINATED SUBSTRATES; CRYSTALLIZATION PROCESS; IN-SITU CHARACTERIZATION TECHNIQUES; SPIN COATING PROCESS; SPIN-COATED THIN FILMS; STRAIGHT-FORWARD METHOD; STRAIGHTFORWARD TECHNIQUES; SURFACE INHOMOGENEITIES;

SPIN DYNAMICS;

EID: 84923917136     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.OE.54.2.024109     Document Type: Article

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