Design optimization & fabrication of micro cantilever for switching application

Sensors and Actuators, A: Physical

Volumn 225, Issue , 2015, Pages 1-7

  Khushalani, Deepak G ^a   Dubey, Vaibhav R ^a   Bheley, Pratik P ^a   Kalambe, Jayu P ^a   Pande, Rajesh S ^a   Patrikar, Rajendra M ^b  

^a SHRI RAMDEOBABA COLLEGE OF ENGINEERING AND MANAGEMENT   (India)

^b VISVESVARAYA NATIONAL INSTITUTE OF TECHNOLOGY   (India)

Author keywords

ANOVA; Cantilever; CoventorWare; MEMS; Taguchi method

Indexed keywords

ANALYSIS OF VARIANCE (ANOVA); DESIGN OF EXPERIMENTS; MEMS; NANOCANTILEVERS; SEMICONDUCTOR SWITCHES; TAGUCHI METHODS;

ACTUATION VOLTAGES; CANTILEVER; COVENTORWARE; DESIGN OPTIMIZATION; DESIGN PARAMETERS; LOW ACTUATION VOLTAGE; SWITCHING APPLICATIONS; VARIED PARAMETERS;

DESIGN;

EID: 84923339709     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2014.10.038     Document Type: Article

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