Electrohydrodynamic direct-writing lithography: An alternative maskless technique for microstructure fabrication

Applied Physics Letters

Volumn 105, Issue 25, 2014, Pages

  He, Jiankang ^a   Xu, Fangyuan ^a   Cao, Yi ^a   Liu, Yaxiong ^a   Li, Dichen ^a   Jin, Zhongmin ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROHYDRODYNAMICS; MICROSTRUCTURE; SUBSTRATES; TISSUE ENGINEERING;

BIOMEDICAL CHIP; ETCHING PROCESS; MICRO-FABRICATION TECHNIQUES; MICROSCALE TECHNOLOGY; MICROSTRUCTURE FABRICATION; OPERATING PARAMETERS; SACRIFICIAL TEMPLATES; SILICON SUBSTRATES;

LITHOGRAPHY;

EID: 84920139136     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4905151     Document Type: Article

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