Development of a 3D-Laserinterferometric Nano-Measuring-System for Abbé-Error-Free Fitting into Scanning force microscopes;Entwicklung eines 3D-laserinterferometrischen Nanomesssystems für den Abbé-fehlerfreien Einbau in Rasterkraftmikroskope

Technisches Messen

Volumn 66, Issue 12, 1999, Pages 504-510

  Büchner, Hans ^b   Jäger, Gerd ^b   Gerhardt, Uwe ^b   Hasche, Klaus ^a,c  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^c Abteilung Fertigungsmesstechnik   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACCURATE MEASUREMENT; CARTESIAN COORDINATE; CARTESIAN COORDINATE SYSTEM; DIMENSIONAL STRUCTURES; HIGHLY ACCURATE; LENGTH MEASUREMENT; ORTHOGONAL PLANE; SCANNING FORCE MICROSCOPES;

INTERFEROMETERS; LASER INTERFEROMETRY; MIRRORS; SCANNING PROBE MICROSCOPY;

THREE DIMENSIONAL;

EID: 0037938940     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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