Spray deposited Mg-doped SnO2 thin film LPG sensor: XPS and EDX analysis in relation to deposition temperature and doping

Journal of Alloys and Compounds

Volumn 625, Issue , 2015, Pages 231-240

  Thomas, Boben ^a   Skariah, Benoy ^a  

^a MAR ATHANASIUS COLLEGE   (India)

Author keywords

Gas sensors; Impurities in semiconductors; Oxide materials; SnO2 thin films; Spray pyrolysis deposition; X ray photoelectron spectroscopy

Indexed keywords

CHEMICAL DETECTION; CHEMICAL SENSORS; CRYSTAL ORIENTATION; CRYSTALLITES; DEPOSITION; GAS ADSORPTION; GAS DETECTORS; GAS SENSING ELECTRODES; IMPURITIES; MAGNESIUM; OXIDE FILMS; OXIDE MINERALS; OXYGEN; OXYGEN VACANCIES; SPRAY PYROLYSIS; THIN FILMS; TIN OXIDES; X RAY PHOTOELECTRON SPECTROSCOPY;

IMPURITIES IN SEMI CONDUCTORS; LOW DOPING CONCENTRATIONS; OPTICAL AND ELECTRICAL PROPERTIES; OXIDE MATERIALS; POLYCRYSTALLINE THIN FILM; SPRAY PYROLYSIS DEPOSITION; SURFACE CHEMICAL COMPOSITION; TETRAGONAL RUTILE STRUCTURE;

SEMICONDUCTOR DOPING;

EID: 84917709181     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2014.11.092     Document Type: Article

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