Micro/nano-mechanical structure fabricated by transfer printing

International Journal of Precision Engineering and Manufacturing

Volumn 15, Issue 12, 2014, Pages 2581-2587

  Yamashita, Takahiro ^a   Yoshino, Kensaku ^a   Kaneko, Arata ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

Mechanical structure; MEMS; Thin film; Transfer printing

Indexed keywords

ENTERTAINMENT INDUSTRY; FABRICATION; FILM THICKNESS; GOLD DEPOSITS; MEMS; NANOTECHNOLOGY; OSCILLATORS (MECHANICAL); OSCILLISTORS; SUBSTRATES;

CROSSLINKED STRUCTURES; FABRICATED STRUCTURES; MECHANICAL STRUCTURES; MEMS APPLICATIONS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); NANO-SCALE MECHANICAL OSCILLATORS; SEMICONDUCTOR PROCESS; TRANSFER PRINTING;

THIN FILMS;

EID: 84916889799     PISSN: 22347593     EISSN: 20054602     Source Type: Journal    
DOI: 10.1007/s12541-014-0630-4     Document Type: Article

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