Etching of glass microchips with supercritical water

Lab on a Chip

Volumn 15, Issue 1, 2015, Pages 311-318

  Karásek, Pavel ^a   Grym, Jakub ^a   Roth, Michal ^a   Planeta, Josef ^a   Foret, František ^a  

^a INSTITUTE OF ANALYTICAL CHEMISTRY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; HOT WATER; HYDROFLUORIC ACID; SILICATE; SOLVENT; WATER;

ARTICLE; LAB ON A CHIP; LASER; MICROTECHNOLOGY; MORPHOLOGY; PRESSURE; SCANNING ELECTRON MICROSCOPY; TEMPERATURE;

EID: 84915745385     PISSN: 14730197     EISSN: 14730189     Source Type: Journal    
DOI: 10.1039/c4lc00843j     Document Type: Article

References (12)

1. M. J. Madou, Fundamentals of Microfabrication, CRC Press, 2nd edn, 2002, Fifth Printing, p. 723
2. H. Weingärtner E. U. Franck Angew. Chem., Int. Ed. 2005 44 2672 2692
3. M. Azaroual C. Fouillac Appl. Geochem. 1997 12 55 73
4. G. C. Kennedy Econ. Geol. 1950 45 629 653
5. R. O. Fournier J. J. Rowe Am. Mineral. 1977 62 1052 1056
6. A. Liebscher Geofluids 2010 10 3 19
7. P. Karásek J. Planeta M. Roth Anal. Chem. 2013 85 327 333
8. K. Šlais M. Horká P. Karásek J. Planeta M. Roth Anal. Chem. 2013 85 4296 4300
9. M. Horká J. Šalplachta P. Karásek A. Kubesová J. Horký H. MatouŠková K. Šlais M. Roth Anal. Chem. 2013 85 6806 6812
10. W. Wagner A. Pruss J. Phys. Chem. Ref. Data 2002 31 387 535
11. W. Wagner and U. Overhoff, ThermoFluids. Interactive software for the calculation of thermodynamic properties for more than 60 pure substances, Springer, Berlin-Heidelberg, 2006
12. J. Křenková K. Klepárník F. Foret J. Chromatogr. A 2007 1159 110 118