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Volumn , Issue , 2014, Pages 600-603

Row-column addressed 2-D CMUT arrays with integrated apodization

Author keywords

[No Author keywords available]

Indexed keywords

ULTRASONIC APPLICATIONS; WAFER BONDING; WAVE ENERGY CONVERSION;

EID: 84910059580     PISSN: 19485719     EISSN: 19485727     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2014.0147     Document Type: Conference Paper
Times cited : (10)

References (11)
  • 2
    • 67650594232 scopus 로고    scopus 로고
    • A 256 x 256 2-d array transducer with rowcolumn addressing for 3-d rectilinear imaging
    • April
    • C. H. Seo and J. T. Yen, "A 256 x 256 2-D array transducer with rowcolumn addressing for 3-D rectilinear imaging, " IEEE Trans. Ultrason., Ferroelec., Freq. Contr., vol. 56, no. 4, pp. 837-847, April 2009.
    • (2009) IEEE Trans. Ultrason., Ferroelec., Freq. Contr , vol.56 , Issue.4 , pp. 837-847
    • Seo, C.H.1    Yen, J.T.2
  • 3
    • 79959543127 scopus 로고    scopus 로고
    • A 32 x 32 element row-column addressed capacitive micromachined ultrasonic transducer
    • June
    • A. S. Logan, L. L. P. Wong, A. I. H. Chen, and J. T. W. Yeow, "A 32 x 32 element row-column addressed capacitive micromachined ultrasonic transducer, " IEEE Trans. Ultrason., Ferroelec., Freq. Contr., vol. 58, no. 6, pp. 1266-1271, June 2011.
    • (2011) IEEE Trans. Ultrason., Ferroelec., Freq. Contr , vol.58 , Issue.6 , pp. 1266-1271
    • Logan, A.S.1    Wong, L.L.P.2    Chen, A.I.H.3    Yeow, J.T.W.4
  • 5
    • 84894300369 scopus 로고    scopus 로고
    • 3-d ultrasound imaging performance of a row-column addressed 2-d array transducer: A measurement study
    • July
    • M. F. Rasmussen and J. A. Jensen, "3-D ultrasound imaging performance of a row-column addressed 2-D array transducer: A measurement study, " in Proc. IEEE Ultrason. Symp., July 2013, pp. 1460-1463.
    • (2013) Proc. IEEE Ultrason. Symp , pp. 1460-1463
    • Rasmussen, M.F.1    Jensen, J.A.2
  • 7
    • 0026838720 scopus 로고
    • Calculation of pressure fields from arbitrarily shaped, apodized, and excited ultrasound transducers
    • J. A. Jensen and N. B. Svendsen, "Calculation of Pressure Fields from Arbitrarily Shaped, Apodized, and Excited Ultrasound Transducers, " IEEE Trans. Ultrason., Ferroelec., Freq. Contr., vol. 39, pp. 262-267, 1992.
    • (1992) IEEE Trans. Ultrason., Ferroelec., Freq. Contr , vol.39 , pp. 262-267
    • Jensen, J.A.1    Svendsen, N.B.2
  • 9
    • 0037387686 scopus 로고    scopus 로고
    • Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology
    • Y. Huang, A. S. Ergun, E. Hæggström, M. H. Badi, and B. T. Khuri-Yakub, "Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology, " J. Microelectromech. Syst, vol. 12, no. 2, pp. 128-137, 2003.
    • (2003) J. Microelectromech. Syst , vol.12 , Issue.2 , pp. 128-137
    • Huang, Y.1    Ergun, A.S.2    Hæggström, E.3    Badi, M.H.4    Khuri-Yakub, B.T.5
  • 10
    • 84861858680 scopus 로고    scopus 로고
    • Double-soi wafer-bonded cmuts with improved electrical safety and minimal roughness of dielectric and electrode surfaces
    • P. Zhang, G. Fitzpatrick, T. Harrison, W. A. Moussa, and R. J. Zemp, "Double-SOI wafer-bonded CMUTs with improved electrical safety and minimal roughness of dielectric and electrode surfaces, " J. Microelectromech. Syst., vol. 21, no. 3, pp. 668-680, 2012.
    • (2012) J. Microelectromech. Syst , vol.21 , Issue.3 , pp. 668-680
    • Zhang, P.1    Fitzpatrick, G.2    Harrison, T.3    Moussa, W.A.4    Zemp, R.J.5
  • 11
    • 0025445393 scopus 로고
    • The evolution of silicon wafer cleaning technology
    • W. Kern, "The evolution of silicon wafer cleaning technology, " J. Electrochem. Soc., vol. 137, no. 6, pp. 1887-1892, 1990
    • (1990) J. Electrochem. Soc , vol.137 , Issue.6 , pp. 1887-1892
    • Kern, W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.