MEMS-based humidity sensor based on thiol-coated gold nanoparticles

9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

Volumn , Issue , 2014, Pages 191-194

  Lin, Che Hsin ^a   Fu, Lung Ming ^b   Lee, Chia Yen ^b  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b NATIONAL PINGTUNG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; FIBER OPTIC SENSORS; GOLD DEPOSITS; GOLD NANOPARTICLES; HUMIDITY SENSORS; METAL NANOPARTICLES; MICROELECTROMECHANICAL DEVICES; MOLECULES; SUBSTRATES;

DEVICE RESISTANCE; GLASS SUBSTRATES; INTERDIGITATED ELECTRODES; K OMEGAS; LARGE SURFACE AREA; RECOVERY TIME; SENSING PERFORMANCE; WATER MOLECULE;

ALUMINUM COATINGS;

EID: 84908617265     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2014.6908788     Document Type: Conference Paper

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