Calibration of microscale standards using multisensor techniques

Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007

Volumn 1, Issue , 2007, Pages 242-245

  Dai, G ^a   Wolff, H ^a   Neugebauer, M ^a   Hartig F ^a   Pohlenz, F ^a   Danzebrink, H U ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MULTI-SENSOR TECHNIQUE;

EID: 84908255912     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. G. Jäger et al. 2001 Annual meeting of ASPE, Crystal City, Virginia, USA, (2001).
2. G. Dai et al. 2006 Atomic force probe for sidewall scanning of nano-And microstructures. Appl. Phys. Lett. 88, p.171908
3. G. Dai et al 2007 Nanoscale surface measurements at sidewalls of nano and micro structures. Meas. Sci. Technol. 18, p.334-41