Corner effect in double and triple gate FinFETs

European Solid-State Device Research Conference

Volumn , Issue , 2003, Pages 135-138

  Burenkov, A ^a   Lorenz, J ^a  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CORNER EFFECTS; FINFETS; TRIPLE-GATE;

EID: 84907707336     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.2003.1256829     Document Type: Conference Paper

References (7)

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7. DESSIS, Release 8.0, ISE AG, Zurich, 2002.