메뉴 건너뛰기




Volumn , Issue , 2002, Pages 659-662

Bulk wafer defects observable in vision chips

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CRYSTAL DEFECTS; DEFECTS;

EID: 84907691757     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.2002.195017     Document Type: Conference Paper
Times cited : (3)

References (6)
  • 2
    • 0042503325 scopus 로고    scopus 로고
    • Effects of oxygen-related defects on the leakage current of silicon p/n junctions
    • Y. Murakami, Y. Satoh, H. Furuya and T. Shingyouji, "Effects of oxygen-related defects on the leakage current of silicon p/n junctions", J Appl. Phys. Vol. 84, pp. 3175-3186, 1998.
    • (1998) J Appl. Phys. , vol.84 , pp. 3175-3186
    • Murakami, Y.1    Satoh, Y.2    Furuya, H.3    Shingyouji, T.4
  • 6
    • 0004246662 scopus 로고
    • (EMIS datareviews series, No 4), Inspec/IEE, ISBN; 0852964757, London
    • Properties of silicon, (EMIS datareviews series, No 4), Inspec/IEE, ISBN; 0852964757, London, 1988.
    • (1988) Properties of Silicon


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.