Structural-phase ordering in Ta2O5-p-Si heterosystem enhanced by microwave processing

2002 23rd International Conference on Microelectronics, MIEL 2002 - Proceedings

Volumn 2, Issue , 2002, Pages 531-534

  Atanassova, E ^c   Boltovets, N S ^a   Kolyadina, E Y ^b   Konakova, R V ^b   Koprinarova, J ^c   Matveeva, L A ^b   Milenin, V V ^b   Mitin, V F ^b   Shynkarenko, V V ^b   Voitsikhovskyi, D I ^b  

^a State Scientific and Research Institute Orion   (Ukraine)

^b INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

^c INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRONS; MICROELECTRONICS; RADIATION EFFECTS; TANTALUM OXIDES;

HETEROSYSTEMS; MICROWAVE PROCESSING; MICROWAVE TREATMENT; MIS STRUCTURE;

SILICON;

EID: 84906683048     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MIEL.2002.1003313     Document Type: Conference Paper

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