Development of high-speed gas bearings for high-power-density micro-devices

Proceedings of the ASME Turbo Expo

Volumn 4, Issue , 2001, Pages

  Ehrich, F F ^a   Jacobson, S A ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CERAMIC MATERIALS; ELECTROMAGNETS; FABRICATION; GAS BEARINGS; SILICON; TURBOMACHINERY; WAFER BONDING;

BONDING TECHNIQUES; ELECTROMAGNETIC DEVICES; FABRICATION CONSTRAINTS; HIGH-POWER-DENSITY; MICRO-TURBOMACHINERY; PERIPHERAL SPEED; ROTATIONAL SPEED; SINGLE-CRYSTAL SILICON WAFERS;

SILICON WAFERS;

EID: 84905728395     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/2001-GT-0478     Document Type: Conference Paper

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