Fabrication and characterization of a micro turbine/bearing rig

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 529-533

  Lin, Chuang Chia ^a   Ghodssi, Reza ^a   Ayon, Arturo A ^a   Chen, Dye Zone ^a   Jacobson, Stuart ^a   Breuer, Kenneth ^a   Epstein, Alan H ^a   Schmidt, Martin A ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; HYDROSTATIC BEARINGS; MICROMACHINING; REACTIVE ION ETCHING; TURBINES;

DOUBLE-SIDED DEEP REACTIVE ION ETCHING (DRIE); LASER-ASSISTED ETCHING (LAE);

MICROELECTROMECHANICAL DEVICES;

EID: 0032675867     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)