Wafer-scale fabricated thermo-pneumatically tunable microlenses

Light: Science and Applications

Volumn 3, Issue , 2014, Pages

  Zhang, Wei ^a   Zappe, Hans ^a   Seifert, Andreas ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

optofluidics; thermo pneumatic actuation; tunable microlens; wafer scale fabrication

Indexed keywords

LENSES; MICROLENSES; PNEUMATICS; SILICONES; VALVES (MECHANICAL);

BACK FOCAL LENGTH; MICROFLUIDIC CHANNEL; OPTO-FLUIDICS; THERMAL ACTUATOR; THERMO-PNEUMATICS; TUNABLE MICRO-LENSES; TUNABLE MICROLENS; WAFER SCALE FABRICATION;

FABRICATION;

EID: 84904791821     PISSN: None     EISSN: 20477538     Source Type: Journal    
DOI: 10.1038/lsa.2014.26     Document Type: Article

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