Microplasma fabrication: From semiconductor technology for 2D-chips and microfluidic channels to rapid prototyping and 3D-printing of microplasma devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 9106, Issue , 2014, Pages

  Shatford, R ^a   Karanassios, Vassili ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

2D chips; 3D chips; 3D printing; Microfluidics; Microplasma fabrication; Microplasmas

Indexed keywords

3D PRINTERS; CLUSTERING ALGORITHMS; COMPUTER CONTROL SYSTEMS; ENVIRONMENTAL TECHNOLOGY; FABRICATION; METAMATERIALS; MICROFLUIDICS; PRINTING; QUARTZ; SEMICONDUCTOR DEVICE MANUFACTURE;

2D-CHIPS; 3D-CHIPS; 3D-PRINTING; COMPUTER NUMERICAL CONTROL MACHINING; MICRO-PLASMAS; SEMI-CONDUCTOR FABRICATION; SEMICONDUCTOR FABRICATION TECHNOLOGY; SEMICONDUCTOR TECHNOLOGY;

PLASMA DEVICES;

EID: 84904768555     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2050538     Document Type: Conference Paper

References (42)

1. Whitesides, M. G., "The origins and the future of microfluidics," Nature, 442, 368-373 (2006).
2. McDonald, C. J. and Whitesides, M. G., "Poly(dimethylsiloxane) as a material for fabricating microfluidic devices," Acc. Chem. Res., 35, 491-499 (2002).
3. Weibel D. B. and Whitesides G. M., "Applications of microfluidics in chemical biology," Current Opinion in Chem. Bio., 10, 584-591 (2006).
4. Leslie, Y., Yeo1, Y. L., Hsueh-Chia Chang H-C., Peggy P. Y. Chan P. Y. P and Friend R. J., "Microfluidic Devices for Bioapplications," Small, 7, 12-48 (2011).
5. Dittrich, S. P. and Manz, A., "Lab-on-a-chip: microfluidics in drug discovery," Nature Reviews Drug Discovery 5, 210-218 (2006).
6. Nge, N. P., Rogers, I. C. and Woolley, T. A., "Advances in microfluidic materials, functions, integration and applications," Chem. Rev., 113, 2550-2583 (2013).
7. Darko, E. and Thurbide, B. K., "Characterization of low-temperature co-fired ceramic tiles as platforms for gas chromatographic separations," Anal. Chem., 85, 5376-5381 (2013).
8. Arora, A., Simone, G., Salieb-Beugelaar, B. G., Kim, T. J. and Manz, A., "Latest developments in micro total analysis systems," Anal. Chem., 82, 4830-4847 (2010).
9. Kovarik, L. M., Gach, C. P., Ornoff, M. D., Wang, Y., Balowski. J., Farrag, L. and Allbritton, L. N., "Micro total analysis systems for cell biology and biochemical assays," Anal. Chem., 84, 516-540 (2012).
10. Culbertson, T. C., Mickleburgh, G. T., Stewart-James, A. S., Sellens, A. K. and Pressnall, M., "Micro total analysis systems: fundamental advances and biological applications," Anal. Chem., 86, 95-118 (2014).
11. Ohno, K-I., Tachikawa, K. and Manz, A., "Microfluidics: Applications for analytical purposes in chemistry and biochemistry," Electrophoresis, 29, 4443-4453 (2008).
12. Collin, W. R., Serrano, G., Wright, K. L., Chang, H., Nuñovero, N. and Zellers, T. E., "Microfabricated gas chromatograph for rapid, trace-level determinations of gas-phase explosive marker compounds," Anal. Chem., 86, 655-663 (2014).
13. Kitson, J. P., Rosnes, H. M., Sand, V., Dragone V. and Cronin, L., "Configurable 3D-printed millifluidic and microfluidic 'lab on a chip' reaction-ware devices," Lab Chip, 12, 3267-3272 (2012).
14. Anderson, B. K., Lockwood, Y. S., Martic, S. R. and Spence, M. D., "A 3D-printed fluidic device that enables integrated features," Anal. Chem., 85, 5622-5626 (2011).
15. Cross, C. B., Erkal, L. Jayda, Lockwood, Y. S., Chen, C. and Specnce M. D., "Evaluation of 3D printing and its potential on Biotechnology and the chemical sciences," Anal. Chem., 86, 3240-253 (2014).
16. Shallan, I. A., Smejkal, P., Corban, M., Guijit, M. R. and Breadmore, C. M., "Cost-effective threedimensional printing of visibly transparent microchips within minutes," Anal. Chem., 86, 3124-3130 (2014).
17. Symes, D. M., Kitson, J. P., Yan, J., Richmond J. C., Cooper, J. T. G., Bowman, R. W., Virbrandt, T. and Cronin, L., "Integrated 3D-printed labware for chemical synthesis and analysis," Nature Chemistry, 4, 349-354 (2012).
18. Weagant, S., Li, L. and Karanassios, V., "Rapid prototyping of hybrid, plastic-quartz 3D-chips for battery-operated microplasmas," InTech Publishing-Chapter 10, 1-18 (2011).
19. Karanassios, V., "Microplasmas for chemical analysis: analytical tools or research toys?," Spectrochim. Acta Part B 59, 909-928 (2004).
20. Nguon, O., Huang, S., Gauthier, M. and Karanassios, V., "Microplasmas: from applications to fundamentals," Proc. SPIE, 9105-5, xxx (2014).
21. Nguon, O., Gauthier, M. and Karanassios, V., "Determination of the loading and stability of Pd in an arborescent copolymer in ethanol by microplasma-optical emission spectrometry," RSC Adv., 4, 8978-8984 (2014).
22. Abbaszadeh, S., Karim, K. S. and Karanassios, V., "Measurement of UV from a microplasma by a microfabricated amorphous selenium detector," IEEE Trans. Elec. Dev. 60, 880-883 (2013).
23. Abbaszadeh, S., Karim S. K. and Karanassios, V., "A microfabricated, low dark current a-Se detector for measurement of microplasma optical emission in the UV for possible use on-site," Proc. of SPIE 8726, 87260S (2013).
24. Devathasan, D., Trebych, K. and Karanassios, V., "3D-printed, sugar cube-size microplasma on a hybrid chip used as a spectral-lamp to characterize UV-Vis transmission characteristics of polycarbonate chips for microfluidic applications," Proc. of SPIE 8718, 8718B1 (2013).
25. Lee, D., Dulai, G. and Karanassios, V., "Survey of energy harvesting and energy scavenging approaches for on-site powering of wireless sensor- and microinstrument-networks," Proc. of SPIE 8028, 8720S1 (2013).
26. Zhang, X. and Karanassios, V., "Rapid prototyping of solar-powered, battery-operated, atmospheric-pressure, sugar-cube size microplasma on hybrid, 3D chips for elemental analysis of liquid microsamples using a portable optical emission spectrometer," Proc. of SPIE 8366, 83660D (2012).
27. Weagant, S., Chen, V. and Karanassios, V., "Battery-operated, argon-hydrogen microplasma on hybrid, postage stamp-size plastic-quartz chips for elemental analysis of liquid microsamples using a portable optical emission spectrometer," Anal. Bioanal. Chem., 401, 2865-2880 (2011).
28. Weagant, S. and Karanassios, V., "Battery-operated, planar-geometry microplasma on a postagestamp size chips: Some fundamentals," Proc. SPIE 8024, 80240L (2011).
29. Weagant, S., Smith, A. T. and Karanassios, V., "Mobile micro- and nano-instruments: Small, Cheap and under Wireless Control," ECS Transactions 28(14), 1-6 (2010).
30. Weagent, S. and Karanassios, V., "Helium-hydrogen microplasma device (MPD) on postage-stamp-size plastic-quartz chips," Anal. Bioanal. Chem. 395, 577-589 (2009).
31. Karanassios, V., Johnson, K. and Smith, A. T., "Micromachined, planar-geometry, atmospheric-pressure, battery-operated microplasma devices (MPDs) on chips for microsamples of liquids, gases or solids by optical emission spectrometry," Anal. Bioanal. Chem. 388, 1595-1604 (2007).
32. Karanassios, V. and Mew, G., "Anisotropic wet chemical etching of Si for chemical analysis applications", Sensors and Materials, 9, 395-416 (1997).
33. Karanassios, V. and J. Sharples, J., "Microchannels and microcells for gaseous microsamples", Sensors and Materials, 9, 363-378 (1997).
34. Karanassios, V, Sharples, T. J. and Nathan, A., "In-situ ultrasonic-assisted etching of 〈100〉 Si wafers by KOH," Sensors and Materials, 9, 427-437 (1997).
35. Swart, N. R., Stevens, M., Nathan, A. and Karanassios, V.," A Flow-insensitive thermal conductivity microsensor and its application to binary gas mixtures," Sensors and Materials 9, 387-393 (1997).
36. Korch, R. and Karanassios, V., "Microfluidics in environmental monitoring: a proposed mechanism for anisotropic wet chemical etching of c-Si," Proc. of SPIE, 4205, 110-116 (2001).
37. Badiei, H. R., Lai, B. and Karanassios, V., "Micro- and nano-volume samples by electrothermal, near-torch vaporization sample introduction using removable, interchangeable and portable rhenium coiled-filament assemblies and axially-viewed inductively coupled plasma-atomic emission spectrometry," Spectrochimica Acta Part B 77, 19-30 (2012).
38. Badiei, H. R., McEnaney, J. and Karanassios, V., "Bringing part of the lab to the field: on-site chromium speciation in seawater by electrodeposition of Cr(III)/Cr(VI) on portable coiled-filament assemblies and measurement in the lab by electrothermal, near-torch vaporization sample introduction and inductively coupled plasma-atomic emission spectrometry," Spectrochimica Acta Part B 78, 42-49 (2012).
39. Badiei, H. R., Liu, C. and Karanassios, V., "Taking part of the lab to the sample: on-site electrodeposition of Pb followed by measurement in the lab using electrothermal, near-torch vaporization sample introduction and inductively coupled plasma-atomic emission spectrometry," Microchemical Journal 108, 131-136 (2013).
40. Badiei, R. H. and Karanassios, V., "Rhenium coil field sampling for determinations by ICP-AES with electrothermal vaporization sample introduction," Spectroscopy, 29, 30-43 (2014).
41. Curtis, C., Eshaque, B, Badali, K. and Karanassios, V., "Rapid prototyping of a microfluidics-based Venturi micropump imprinted on polymeric, postage stamp sized chips," Proc. of SPIE, 8633, 83660P1-83660P8 (2012).
42. Davis, W. R., Wilson, J., Mick, S., Xu, J., Hao H., Mineo, C., Sule, A. M., Steer, M. and Franzon, P. D., "Demystifying 3D ICs: the pros and cons of going vertical," IEEE Design & Test of Computers, 22, 498-510 (2005).